Nanoscale calibration standards and methods :  dimensional and related measurements in the micro- and nanometer range / 
edited by Gunter Wilkening, Ludger Koenders 
 - Weinheim, Germany :  Wiley-VCH,  2005 
 - xxii, 518 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>352740502X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology