TY  - BOOK
AU  - Wilkening,Gunter
AU  - Koenders,Ludger
TI  - Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range 
SN  - 352740502X
PY  - 2005///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -