@book{58560,
	author = {International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" and Pichaud, B.},
	title = {Proceeding of the 11th International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology :},
	publisher = {Trans Tech Pub.,},
	year = {c2005},
	address = {Uetikon-Zurich, Switzerland :}
}