Proceeding of the 11th International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology :  GADEST 2005, Giens, France, September 25-30, 2005 
 Gettering and Defect Engineering in Semiconductor Technology 

 - Uetikon-Zurich, Switzerland :  Trans Tech Pub.,  c2005 
 - xvi, 814 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>3908451132 9783908451136 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Congresses<br/>Getters--Congresses<br/>Silicon crystals--Defects--Congresses<br/>Electrical engineering--Materials--Congresses