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  <titleInfo>
    <title>Proceeding of the 11th International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology</title>
    <subTitle>GADEST 2005, Giens, France, September 25-30, 2005</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Gettering and Defect Engineering in Semiconductor Technology</title>
  </titleInfo>
  <name type="conference">
    <namePart>International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" 2005 : Giens, France)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Pichaud, B.</namePart>
  </name>
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    <place>
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    <publisher>Trans Tech Pub.</publisher>
    <dateIssued>c2005</dateIssued>
    <dateIssued encoding="marc">2005</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xvi, 814 p. : ill. ; 25 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Getters</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Silicon crystals</topic>
    <topic>Defects</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Electrical engineering</topic>
    <topic>Materials</topic>
    <topic>Congresses</topic>
  </subject>
  <identifier type="isbn">3908451132</identifier>
  <identifier type="isbn">9783908451136</identifier>
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