TY  - BOOK
AU  - Pichaud,B.
ED  - International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology"
TI  - Proceeding of the 11th International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology: GADEST 2005, Giens, France, September 25-30, 2005
SN  - 3908451132
PY  - 2005///
CY  - Uetikon-Zurich, Switzerland
PB  - Trans Tech Pub.
KW  - Semiconductors
KW  - Congresses
KW  - Getters
KW  - Silicon crystals
KW  - Defects
KW  - Electrical engineering
KW  - Materials
N1  - Includes bibliographical references and index
ER  -