TY  - BOOK
AU  - Gad-El-Hak,Mohamed
TI  - MEMS: introduction and fundamentals 
SN  - 0849391385
PY  - 2006///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
ER  -