00662nam a2200229 a 4500001001400000003000700014005001700021008004100038020001500079040000800094245005400102250001200156260004200168300004000210440002200250650003500272650001400307650001900321650001100340700002400351856005700375vtls000016581KUKTEM20251117150456.0061122                       000 0 eng d  a0849391393  aUMP00aMEMS applications /cedited by Mohamed Gad-el-Hak  a2nd ed.  aBoca Raton :bTaylor & Francis,c2006  a(various pagings) :bill. ;c26 cm. 4aThe MEMS handbook 0aMicroelectromechanical systems 0aDetectors 0aMicroactuators 0aRobots1 aGad-El-Hak, Mohamed42ahttp://www.loc.gov/catdir/toc/fy0702/2005051409.html