Lithography :  main techniques / 
edited by Stefan Landis 
 - London :  Hoboken, NJ :  ISTE ;  Wiley,  2011 
 - xxv, 377 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/> "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher 
<br/><br/><label>ISBN: </label>9781848212022 (hardback) 184821202X (hardback) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography