01007nam a2200193 a 4500001001400000003000700014005001700021008004100038020002900079020002600108040000800134245006200142260005000204300003400254504005000288520043500338650002100773700001900794vtls000051859KUKTEM20251117150505.0110311t2011    enka   f      001 0 eng d  a9781848212022 (hardback)  a184821202X (hardback)  aUMP00aLithography :bmain techniques /cedited by Stefan Landis  aLondon :bISTE ;aHoboken, NJ :bWiley,c2011  axxv, 377 p. :bill. ;c25 cm.  aIncludes bibliographical references and index  a"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher 0aMicrolithography1 aLandis, Stefan