01247nam a2200241 a 4500 vtls000051859 KUKTEM 20251117150505.0 110311t2011 enka f 001 0 eng d 9781848212022 (hardback) 184821202X (hardback) 201110131222 fauzi 201107140037 VLOAD 201103110957 irma UMP TK7872.M3 L58 2011 Lithography : main techniques / edited by Stefan Landis London : ISTE ; Hoboken, NJ : Wiley, 2011 xxv, 377 p. : ill. ; 25 cm. Includes bibliographical references and index "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher Microlithography Landis, Stefan 0 0 0 0 20000 20000 2019-09-04 424.12 0 TK7872.M3 L58 2011 0000059781 2019-09-04 00:00:00 1 424.12 2019-09-04 OPEN VIRTUA40 59385 59391 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*5200*6500*7000*9991