01393nam a2200253 a 4500001001400000003000700014005001700021008004100038020002900079020002600108039006500134040000800199090002300207245006200230260005000292300003400342504005000376520043500426650002100861700001900882952013400901999002701035999007701062vtls000051859KUKTEM20251117150505.0110311t2011    enka   f      001 0 eng d  a9781848212022 (hardback)  a184821202X (hardback) 9a201110131222bfauzic201107140037dVLOADy201103110957zirma  aUMP  aTK7872.M3 L58 201100aLithography :bmain techniques /cedited by Stefan Landis  aLondon :bISTE ;aHoboken, NJ :bWiley,c2011  axxv, 377 p. :bill. ;c25 cm.  aIncludes bibliographical references and index  a"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher 0aMicrolithography1 aLandis, Stefan  00104070a20000b20000d2019-09-04g424.12l0oTK7872.M3 L58 2011p0000059781r2019-09-04 00:00:00t1v424.12w2019-09-04yOPEN  aVIRTUA40c59385d59391  aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*5200*6500*7000*9991