Silicon technologies :  ion implantation and thermal treatment / 
edited by Annie Baudrant 
 - London :  Wiley,  2011 
 - xvii, 337 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781848212312 1848212313 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor doping<br/>Ion implantation<br/>Semiconductors--Heat treatment