Nano-lithography / 
edited by Stefan Landis 
 - London, UK :  Hoboken, NJ :  ISTE ;  Wiley,  2011 
 - xxv, 325 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography 
<br/><br/><label>ISBN: </label>9781848212114 1848212119 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography<br/>Nanotechnology