00962nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112130002900120245004800149260005400197300003400251504005000285505035000335650002100685650001900706700001900725vtls000055974KUKTEM20251125093000.0111116t2011    enka   f b    001 0 eng d  a9781848212114  a1848212119  aUMP0 aNanolithographylEnglish10aNano-lithography /cedited by Stefan Landis  aLondon, UK :bISTE ;aHoboken, NJ :bWiley,c2011  axxv, 325 p. :bill. ;c24 cm.  aIncludes bibliographical references and index0 aCh. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography 0aMicrolithography 0aNanotechnology1 aLandis, Stefan