01190nam a2200265 a 4500 vtls000055974 KUKTEM 20251125093000.0 111116t2011 enka f b 001 0 eng d 9781848212114 1848212119 201202011630 fauzi 201111161028 sri UMP TK7872.M3 N36 2011 Nanolithography English Nano-lithography / edited by Stefan Landis London, UK : ISTE ; Hoboken, NJ : Wiley, 2011 xxv, 325 p. : ill. ; 24 cm. Includes bibliographical references and index Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography Microlithography Nanotechnology Landis, Stefan 0 0 0 0 10000 10000 2019-09-04 422.47 0 TK7872.M3 N36 2011 0000062009 2019-09-04 00:00:00 1 422.47 2019-09-04 OPEN VIRTUA40 60183 60189 VTLSSORT0080*0200*0201*0400*0900*1300*2450*2600*3000*5040*5050*6500*6501*7000*9991