Landis, Stefan text bibliography enk London, UK Hoboken, NJ ISTE Wiley 2011 monographic eng

print

xxv, 325 p. : ill. ; 24 cm. Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography specialized edited by Stefan Landis Includes bibliographical references and index Microlithography Nanotechnology 9781848212114 1848212119 UMP 111116 20251125093000.0 vtls000055974