00821nam a2200241 a 4500001001400000003000700014005001700021008004100038020001500079020001800094040000800112245010500120260004900225300003500274490004700309504005000356650002000406650004500426650001900471700002300490700001900513830004700532vtls000000518KUKTEM20251125093033.0060606t2004    maua   f      001 0 eng d  a1580537405  a9781580537407  aUMP00aAdvances in silicon carbide processing and applications /cStephen E. Saddow, Anant Agarwal, editors  aBoston, MA :bArtech House Publishers,c2004  axiii, 212 p. :bill. ;c26 cm.1 aSemiconductor materials and devices series  aIncludes bibliographical references and index 0aSilicon carbide 0aSilicon carbidexIndustrial applications 0aSemiconductors1 aSaddow, Stephen E.1 aAgarwal, Anant 0aSemiconductor materials and devices series