TY  - BOOK
AU  - Saddow,Stephen E.
AU  - Agarwal,Anant
TI  - Advances in silicon carbide processing and applications
T2  - Semiconductor materials and devices series
SN  - 1580537405
PY  - 2004///
CY  - Boston, MA
PB  - Artech House Publishers
KW  - Silicon carbide
KW  - Industrial applications
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -