00929nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245015900120260005700279300003300336490006300369504005000432650005900482650003500541650004800576700002200624830005300646vtls000061717KUKTEM20251125093037.0120611t1999    paua   f b    001 0 eng d  a9781558994768  a1558994769  aUMP00aIn situ process diagnostics and modelling :bsymposium held April 6-7, 1999, San Francisco, California, U.S.A. /ceditors by Orlando Auciello ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc1999  axi, 199 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 569  aIncludes bibliographical references and index 0aThin film devicesxDesign and constructionvCongresses 0aPlasma diagnosticsvCongresses 0aLasersxIndustrial applicationsvCongresses1 aAuciello, Orlando 0aMaterials Research Society symposium proceedings