01166nam a2200277 a 4500 vtls000061717 KUKTEM 20251125093037.0 120611t1999 paua f b 001 0 eng d 9781558994768 1558994769 201304031220 jamie 201206111642 safura UMP TK7872.T55 I57 1999 In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A. / editors by Orlando Auciello ... [et al.] Warrendale, PA : Materials Research Society, c1999 xi, 199 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 569 Includes bibliographical references and index Thin film devices Design and construction Congresses Plasma diagnostics Congresses Lasers Industrial applications Congresses Auciello, Orlando Materials Research Society symposium proceedings 0 0 0 0 20000 20000 2019-09-04 103.77 0 TK7872.T55 I57 1999 0000072036 2019-09-04 00:00:00 1 103.77 2019-09-04 OPEN VIRTUA40 60834 60840 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992