TY  - BOOK
AU  - Auciello,Orlando
TI  - In situ process diagnostics and modelling: symposium held April 6-7, 1999, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558994768
PY  - 1999///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Thin film devices
KW  - Design and construction
KW  - Congresses
KW  - Plasma diagnostics
KW  - Lasers
KW  - Industrial applications
N1  - Includes bibliographical references and index
ER  -