@book{60842,
	author = {Merhari, Lhadi},
	title = {Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics :},
	publisher = {Materials Research Society,},
	year = {2001},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, Pa. :}
}