MEMS and nanotechnology.  proceedings of the 2011 annual conference on experimental and applied mechanics /  Vol. 4 : 
Tom Proulx, editor 
 - New York :  Springer,  c2011 
 - viii, 191 p. :  ill. ;  29 cm. 
 - Conference proceedings of the society for experimental mechanics series .
 - Conference proceedings of the society for experimental mechanics series .
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9781461402091 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Nanotechnology--Congresses