TY  - BOOK
AU  - Proulx,Tom
ED  - SEM Conference on Experimental and Applied Mechanics
TI  - MEMS and nanotechnology: proceedings of the 2011 annual conference on experimental and applied mechanics 
T2  - Conference proceedings of the society for experimental mechanics series
SN  - 9781461402091
PY  - 2011///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanotechnology
N1  - Includes bibliographical references
ER  -