Novel materials and processes for advanced CMOS :  symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. / 
editors by Mark I. Gardner ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2003 
 - xiii, 384 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 745 .
 - Materials Research Society symposium proceedings .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558996823 1558996826 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors--Materials--Congresses<br/>Metal oxide semiconductors, Complementary--Materials--Congresses<br/>Nanostructured materials--Congresses<br/>Gate array circuits--Materials--Congresses<br/>Dielectrics--Congresses