01159nam a2200265 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111009200120245016300212260005700375300003500432490006300467504005000530650005400580650006900634650004100703650004700744650002800791700002100819830005300840vtls000062356KUKTEM20251125093041.0120619t2003    paua   f b    001 0 eng d  a9781558996823  a1558996826  aUMP2 aSymposium N, "Novel Materials and Processes for Advanced CMOS"d(2002 :cBoston, Mass.)00aNovel materials and processes for advanced CMOS :bsymposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. /ceditors by Mark I. Gardner ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc2003  axiii, 384 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 745  aIncludes bibliographical references and index 0aMetal oxide semiconductorsxMaterialsvCongresses 0aMetal oxide semiconductors, ComplementaryxMaterialsvCongresses 0aNanostructured materialsvCongresses 0aGate array circuitsxMaterialsvCongresses 0aDielectricsvCongresses1 aGardner, Mark I. 0aMaterials Research Society symposium proceedings