TY  - BOOK
AU  - Gardner,Mark I.
ED  - Symposium N, "Novel Materials and Processes for Advanced CMOS"
TI  - Novel materials and processes for advanced CMOS: symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558996823
PY  - 2003///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Metal oxide semiconductors
KW  - Materials
KW  - Congresses
KW  - Metal oxide semiconductors, Complementary
KW  - Nanostructured materials
KW  - Gate array circuits
KW  - Dielectrics
N1  - Includes bibliographical references and index
ER  -