Photons and low energy particles in surface processing :  symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / 
editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang 
 - Pittsburgh, Pa. :  Materials Research Society,  1992 
 - xv, 552 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings,  v. 236  0272-9172 ; .
 - Materials Research Society symposium proceedings ;  v. 236 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558991309 1558991301 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Surfaces (Technology)--Congresses<br/>Plasma etching--Congresses<br/>Lasers--Industrial applications--Congresses<br/>Photon beams--Industrial applications--Congresses<br/>Plasma-enhanced chemical vapor deposition--Congresses