Photons and low energy particles in surface processing
symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A
Ashby, Carol Iris Hill
Brannon, James H.
Pang, Stella W.
text
pau
Pittsburgh, Pa
Materials Research Society
1992
monographic
eng
xv, 552 p. : ill. ; 24 cm.
specialized
editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang
Includes bibliographical references and index
Surfaces (Technology)
Congresses
Plasma etching
Congresses
Lasers
Industrial applications
Congresses
Photon beams
Industrial applications
Congresses
Plasma-enhanced chemical vapor deposition
Congresses
Materials Research Society symposium proceedings ; v. 236
9781558991309
1558991301
UMP
120619
20251125093106.0
vtls000062493