TY  - BOOK
AU  - Ashby,Carol Iris Hill
AU  - Brannon,James H.
AU  - Pang,Stella W.
TI  - Photons and low energy particles in surface processing: symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings,
SN  - 9781558991309
PY  - 1992///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Surfaces (Technology)
KW  - Congresses
KW  - Plasma etching
KW  - Lasers
KW  - Industrial applications
KW  - Photon beams
KW  - Plasma-enhanced chemical vapor deposition
N1  - Includes bibliographical references and index
ER  -