@book{61436,
	author = {Symposium S, "Microelectromechanical Systems--Materials and Devices IV" and DelRio, Frank W.},
	title = {Microelectromechanical systems--materials and devices IV :},
	publisher = {Cambridge University Press,},
	year = {2011},
	series = {Materials Research Society symposium proceedings ;},
	address = {New York :}
}