01397nam a2200313 a 4500 vtls000062119 KUKTEM 20251125093113.0 120618t2011 nyuda f 001 0 eng d 9781605112763 1605112763 201304181522 huda 201206181032 safura UMP TK7875 .S96 2010 Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / editors, Frank W. DelRio ... [et al.] New York : Cambridge University Press, 2011 ix, 207 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 1299 Includes bibliographical references and indexes Microelectromechanical systems Materials Congresses Microelectromechanical systems Congresses Thin films Congresses Nanostructured materials Congresses Silicon Congresses DelRio, Frank W. Materials Research Society symposia proceedings ; v. 1299 0 0 0 0 20000 20000 2019-09-04 332.18 0 TK7875 .S96 2010 0000070757 2019-09-04 00:00:00 1 332.18 2019-09-04 OPEN VIRTUA40 61436 61442 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992