TY  - BOOK
AU  - DelRio,Frank W.
ED  - Symposium S, "Microelectromechanical Systems--Materials and Devices IV"
TI  - Microelectromechanical systems--materials and devices IV: symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605112763
PY  - 2011///
CY  - New York
PB  - Cambridge University Press
KW  - Microelectromechanical systems
KW  - Materials
KW  - Congresses
KW  - Thin films
KW  - Nanostructured materials
KW  - Silicon
N1  - Includes bibliographical references and indexes
ER  -