Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A. /
editors by David J. Srolovitz ... [et al.]
- Pittsburgh, PA : Materials Research Society, c1995
- xi, 382 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 389 .
- Materials Research Society symposium proceedings .