MEMS materials and processes handbook / 
editors by Reza Ghodssi, Pinyen Lin 
 - New York ;  London :  Springer,  c2011 
 - xxxv, 1187 p. :  ill. ;  24 cm. 
 - MEMS reference shelf .
 - MEMS reference shelf .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780387473161 0387473165 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Materials<br/>Microelectromechanical systems