TY  - BOOK
AU  - Ghodssi,Reza
AU  - Lin,Pinyen
TI  - MEMS materials and processes handbook
T2  - MEMS reference shelf
SN  - 9780387473161
PY  - 2011///
CY  - New York, London
PB  - Springer
KW  - Microelectromechanical systems
KW  - Materials
N1  - Includes bibliographical references and index
ER  -