@book{62843,
	author = {Symposium and Boning, Duane S.},
	title = {Advances in chemical-mechanical polishing :},
	publisher = {Materials Research Society,},
	year = {c2004},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, PA. :},
	edition = {v. 816},
	note = {"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi}
}