Advances in chemical-mechanical polishing :  symposium held April 13-15, 2004, San Francisco, California, U.S.A. / 
editors, Duane S. Boning ... [et al.] 
 - v. 816 
 - Warrendale, PA. :  Materials Research Society,  c2004 
 - xi, 292 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 816 .
 - Materials Research Society symposium proceedings ;  v. 816 .
<br/><br/> "The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558997660 1558997660 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrolytic polishing--Congresses<br/>Grinding and polishing--Congresses<br/>Chemical mechanical planarization--Congresses