symposium held April 13-15, 2004, San Francisco, California, U.S.A Symposium creator Boning, Duane S. text pau Warrendale, PA Materials Research Society c2004 2004 v. 816 monographic eng

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xi, 292 p. : ill. ; 24 cm. specialized editors, Duane S. Boning ... [et al.] "The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi Includes bibliographical references and index Electrolytic polishing Congresses Grinding and polishing Congresses Chemical mechanical planarization Congresses 9781558997660 1558997660 UMP 120523 20251125093238.0 vtls000060094