TY  - BOOK
AU  - Boning,Duane S.
ED  - Symposium
TI  - Advances in chemical-mechanical polishing: symposium held April 13-15, 2004, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558997660
PY  - 2004///
CY  - Warrendale, PA.
PB  - Materials Research Society
KW  - Electrolytic polishing
KW  - Congresses
KW  - Grinding and polishing
KW  - Chemical mechanical planarization
N1  - "The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi; Includes bibliographical references and index
ER  -