Robertson, Max <br/><br/>
Substrate surface preparation handbook /  Max Robertson 

 - Norwood, MA :  Artech House,  2012 
 - 195 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry 
<br/><br/><label>ISBN: </label>9781608072132 1608072134 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Surfaces<br/>Epitaxy