TY  - BOOK
AU  - Robertson,Max
TI  - Substrate surface preparation handbook: Max Robertson
SN  - 9781608072132
PY  - 2012///
CY  - Norwood, MA
PB  - Artech House
KW  - Semiconductors
KW  - Surfaces
KW  - Epitaxy
N1  - Includes bibliographical references and index; Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
ER  -