@book{63023,
	author = {Advanced Metallization Conference and Ray, Gary W. and University of California, Berkeley.},
	title = {Advanced Metallization Conference 2003 (AMC 2003) :},
	publisher = {Materials Research Society,},
	year = {c2004},
	series = {Materials Research Society conference proceedings},
	address = {Warrendale, Pa. :}
}