Advanced Metallization Conference 2003 (AMC 2003) :  proceedings of the conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003 University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. / 
 AMC 2003 
editors, Gary W. Ray ... [et al] 
 - Warrendale, Pa. :  Materials Research Society,  c2004 
 - xxiii, 792  p. :  ill. ;  24 cm. 
 - Materials Research Society conference proceedings  1048-0854 .
 - Materials Research Society conference proceedings .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558997578 1558997571 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Thin films--Congresses<br/>Metallic films--Congresses<br/>Metallizing--Congresses