Advanced Metallization Conference 2002 (AMC 2002) :  proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan / 
 AMC 2002 
editors, Bradley M. Melnick ... [et al.] 
 - Warrendale, Pa. :  Materials Research Society,  c2003 
 - xxiv, 881 p. :  ill. ;  24 cm. 
 - Materials Research Society conference proceedings,  1048-0854 .
 - Materials Research Society conference proceedings, .
<br/><br/> "This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." 
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558997196 1558997199 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Thin films--Congresses<br/>Metallic films--Congresses<br/>Metallizing--Congresses