01935nam a2200361 a 4500 vtls000060013 KUKTEM 20251125093307.0 120522t2003 paua f b 101 0 eng d 9781558997196 1558997199 201710021127 AUTHORITY 201212031253 fauzi 201211281541 fauzi 201211281517 fauzi 201205221502 safura UMP TK7871.85 .A38 2003 Advanced Metallization Conference Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan / editors, Bradley M. Melnick ... [et al.] AMC 2002 Warrendale, Pa. : Materials Research Society, c2003 xxiv, 881 p. : ill. ; 24 cm. Materials Research Society conference proceedings, 1048-0854 "This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." Includes bibliographical references and indexes Semiconductors Design and construction Congresses Integrated circuits Ultra large scale integration Design and construction Congresses Integrated circuits Ultra large scale integration Materials Congresses Thin films Congresses Metallic films Congresses Metallizing Congresses Melnick, Bradley M. University of California, Berkeley. Continuing Education in Engineering Materials Research Society conference proceedings, 1048-0854 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7871.85 .A38 2003 0000068297 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 63328 63334 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992