01604nam a2200313 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111003800120245027000158246001300428260005800441300003600499490005400535500018700589504005200776650005600828650009200884650007800976650002701054650003101081650002801112700001901140710007701159830005401236vtls000060025KUKTEM20251125093311.0120522t2007    paua   f b    101 0 eng d  a9781558999473  a1558999477  aUMP2 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2006 (AMC 2006) :bproceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006,  at the University of Tokyo, Tokyo, Japan /ceditors: Stephen W. Russell   ... [et al.]30aAMC 2006  aWarrendale, Pa. :bMaterials Research Society,cc2007  axxii, 693  p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings  aThis combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aRussell, S. W.2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings