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  <titleInfo>
    <title>Advanced Metallization Conference 2006 (AMC 2006)</title>
    <subTitle>proceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006,  at the University of Tokyo, Tokyo, Japan</subTitle>
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    <title>AMC 2006</title>
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  <name type="conference">
    <namePart>Advanced Metallization Conference</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Russell, S. W.</namePart>
  </name>
  <name type="corporate">
    <namePart>University of California, Berkeley</namePart>
    <namePart>Continuing Education in Engineering</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">pau</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Warrendale, Pa</placeTerm>
    </place>
    <publisher>Materials Research Society</publisher>
    <dateIssued>c2007</dateIssued>
    <dateIssued encoding="marc">2007</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xxii, 693  p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">editors: Stephen W. Russell   ... [et al.]</note>
  <note>This combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.</note>
  <note>Includes bibliographical references and indexes</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Design and construction</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Ultra large scale integration</topic>
    <topic>Design and construction</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Ultra large scale integration</topic>
    <topic>Materials</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Thin films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metallic films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metallizing</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Materials Research Society conference proceedings</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">9781558999473</identifier>
  <identifier type="isbn">1558999477</identifier>
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