TY  - BOOK
AU  - Russell,S.W.
ED  - Advanced Metallization Conference
ED  - University of California, Berkeley.
TI  - Advanced Metallization Conference 2006 (AMC 2006): proceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006,  at the University of Tokyo, Tokyo, Japan 
T2  - Materials Research Society conference proceedings
SN  - 9781558999473
PY  - 2007///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Thin films
KW  - Metallic films
KW  - Metallizing
N1  - This combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p; Includes bibliographical references and indexes
ER  -